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Technical Glossary

Technical Glossary

Technical Glossary

Technical Glossary

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A

  • Coating

    A-ZERON™
    Atomic Layer Deposition-ZERON
    An A-ZERON(Atomic Layer Deposition-ZERON) coating is a high-dense coating technique that creates a deposition layer at an atomic level.
    Plasma Etch 3-D type Product
    #3-D Product #Al₂O₃ #APS #Plasma Etch

  • Coating

    AP
    Atmospheric Plasma
    Atmospheric Plasma is consist of reactant(mostly Ar), ion, electron and is used as the heat source of the APS coating.
    Plasma Etch 3-D type Product
    #APS #Coating #YAG #YF₃ #YOF #Y₂O₃

  • Coating

    APS Al₂O₃
    Atmospheric Plasma Spray Al₂O₃Coating
    An APS coating (Atmospheric Plasma Spray Al2O3 Coating) is a ceramic coating technique that uses atmospheric plasma spray with Al2O3 Powder to create a coating layer.
    Plasma Etch 3-D type Parts
    #3-D Product #Al₂O₃ #APS #Plasma Etch

  • Coating

    Atomic layer
    Atomic Layer
    Atom on the atomic layer refers to a single size of reactant and ALD(atomic layer deposition coating) is deposition layered coating.
    Plasma Etch 3-D type Product
    #ALD #Al₂O₃

B

  • Cleaning

    By-Product
    By-Product
    A by-product is leftover created by the chemical reaction between semiconductor process gas and plasma; the main reason for having a cleaning process.
    All Product
    #All Process

C

  • Cleaning

    CAUS™
    Chemical Assisted Ultra Sonic
    Cleaning techniques that use chemical and ultrasonic to remove contaminated layer and particles.
    Shower Head
    #By-Product Removal #Chemical #Hole Product #Ultra Sonic

  • Cleaning

    CDA
    Clean Dry Air
    CDA (clean dry air) is pressurized pure air that is used to separate moisture, oil, and solid particles exceeding 0.01μm.
    All Product
    #All Process

  • Cleaning

    Chelate Chemical
    Chelate Chemical
    Chelate Chemical is a cleaning agent consist of ligands using a bonding reaction to remove metal ions from the applied area.
    All Product
    #TIC™

  • Cleaning

    CIS™
    Chemical Injection System
    Cleaning techniques that use a pump to forcibly inject chemicals to cleanse.
    Shower Head
    #By-Product Removal #Chemical #Fluid Flow #Hole Product

D

  • Cleaning

    D-LPC™
    Dynamic Liquid Particle Counter
    Real-time particle measuring instrument using the liquid circular system.
    All Product
    #All Product #In-line #Liquid Particle Counter

  • Cleaning

    DELTA™
    DELTA Process
    Improved surface polishing process using chemicals.
    Al Product
    #Al Product #Chemical #Particle Removal #Surface Roughness

  • Cleaning

    DIS™
    Deionized Water Injection System
    Cleaning techniques that use a pump to forcibly inject DIW to cleanse.
    Shower Head
    #By-Product Removal #Deionized Water #Fluid Flow #Hole Product

  • Cleaning

    DIW
    Deionized Water
    DIW(deionized water)is a pure form of water that is free of metal ions and mineral ions.
    All Product
    #All Process

E

  • Coating

    E-ARC™
    Enhanced-ARC Spray Coating
    An ARC Spray Coating with an enhanced spray gun (Nozzle and cap) to enhance roughness of surfaces.
    Applying PVD process to parts
    #Al #ARC Spray #Cap #PVD Process

  • Coating

    E-SAF™
    E-SAC YOF(Enhanced Super Advanced Coating YOF)
    E-SAC YOF(Enhanced Super Advanced)coating is a suspension plasma coating technique that uses YOF Fine Powder in slurry form to create a high-density ceramic coating layer.
    Plasma Etch 3-D type Product
    #3-D Product #Fine Powder #Plasma Etch #Slurry #SPS #YOF

  • Coating

    E-SAG™
    E-SAC YAG(Enhanced Super Advanced Coating YAG)
    E-SAC YAG(Enhanced Super Advanced)coating is a suspension plasma coating technique that uses YAG Fine Powder in slurry form to create a high-density ceramic coating layer.
    Plasma Etch 3-D type Product
    #3-D Product #Fine Powder #Plasma Etch #Slurry #SPS #YAG

  • Coating

    E-SAY™
    E-SAC Y₂O₃(Enhanced Super Advanced Coating Y₂O₃)
    E-SAC Y₂O₃(Enhanced Super Advanced)coating is a suspension plasma coating technique that uses Y₂O₃ Fine Powder in slurry form to create a high-density ceramic coating layer.
    Plasma Etch 3-D type Product
    #3-D Product #Fine Powder #Plasma Etch #Slurry #SPS #Y₂O₃

  • Coating

    Embossing
    Embossing
    Plasma Etch 3-D type Product
    #Aluminium #ARC Spray #PVD Process

  • Coating

    EP-ZERON™
    Electronic beam Physical Vapor Deposition-ZERON Coating
    A high-density ceramic coating method using (E-beam PVD) thermionic emission.
    Plasma Etch Plate type Product
    #E-beam evaporation #Plasma Etching #Plate type Product #PVD #YAG #YOF #YSO #Y₂O₃

H

  • Coating

    HEMI-2000T™
    HEMIsphere Enhanced ARC Spray Coating- Ra 2000 μinch
    Embossing technique that creates 2000 μinch roughness using HEMI ARC Coating.
    PVD 3-D type Product
    #3-D Product #ARC Spray #Hemisphere #Metal Coating #PVD Process

  • Coating

    HEMI-4000E™
    HEMIsphere Enhanced ARC Spray Coating-Ra 4000 μinch
    Embossing technique that creates 4000 μinch roughness using HEMI ARC Coating.
    PVD 3-D type Product
    #3-D Product #ARC Spray #Hemisphere #Metal Coating #PVD Process

  • Coating

    HEMI-600E™
    HEMIsphere Enhanced ARC Spray Coating- Ra 600 μinch
    Embossing technique that creates 600 μinch roughness using HEMI ARC Coating.
    PVD 3-D type Product
    #3-D Product #ARC Spray #Hemisphere #Metal Coating #PVD Process

  • Coating

    HEMI™
    HEMI ARC Coating
    An ARC coating technique using Al wire to create roughness over 2000μinch.
    PVD 3-D type Product
    #3-D Product #ARC Spray #Hemisphere #Metal Coating #PVD Process

  • Cleaning

    HPWS™
    High Pressure Water Spray
    High pressure deionized water spray.
    All Product
    #All Product #Deionized Water #High Pressure #Particle Removal

  • Cleaning

    HTGS™
    High Temperature Gas Spray
    A cleaning technique using high-temperature steam to remove by-product contamination.
    Shower Head, SUS Product
    #All Product #By-Product Removal #Hot Gas

L

  • Cleaning

    LWTS
    Light Wave Treatment on Surface
    A surface treatment using ultraviolet light.
    APS, SAC Coating Product
    #Coating Treatment #Organic #Surface Treatment #Ultra Violet

M

  • Coating

    MAHA™
    MAHA
    Metal coating technique using a 3D printing method to create a high-density metal coating layer.
    PVD Ring type Product
    #3-D Printing #Free Shape #Metal Coating #PVD Process

  • Cleaning

    MBS™
    Micro Brush System
    ARC coating surface cleaning technique
    ARC Coating Product
    #ARC Coating Product #Particle Removal #Physical

  • Cleaning

    Micro Size bubble
    Micro Size bubble
    Foam under 50μm diameter.
    All Product
    #SBC™

  • Cleaning

    MPS™
    Micro Powder Spray
    A cleaning technique using pellet size CO2(carbon dioxide) as a projectile to remove particles.
    All Product
    #All Product #Dry Ice #Particle Removal

N

  • Cleaning

    No-Dam™
    No-Damage
    Water jet cleaning technique to remove the coating, contaminated layer and minimize the effect on the hole diameter.
    APS, SAC, ARC Coating Product
    #All Product #By-Product #Deionized Water #High Pressure

P

  • Coating

    P-ZERON
    Physical Vapor Deposition- ZERON Coating
    A ceramic coating technique using sputtering to create a high-density coating layer.
    Etch Plate type Product
    #Plasma Etch #Plate type Product #PVD #Sputtering

  • Cleaning

    Particle
    Particle
    Particles are organic, inorganic, metal substances that may cause trouble in the semi-conductor process.
    All Product
    #All Process

  • Cleaning

    PBC™
    Pulse Beam Clean
    A technique to remove contaminated membranous layer using a laser.
    APS, SAC Coating Product
    #By-Product Removal #Coating Product #Dry Clean #Laser

  • Cleaning

    PBR-2™
    Power Bubble Rinse-2
    A cleaning technique that forcibly injects deionized water using an air bubble at high output.
    Shower Head
    #Bubble #Deionized Water #High Pressure #Hole Product #Particle Removal

  • Cleaning

    PBR™
    Power Bubble Rinse
    A cleaning technique that forcibly injects deionized water using an air bubble
    Shower Head
    #Bubble #Deionized Water #Hole Product #Particle Removal

  • Cleaning

    POC™
    Particle Oxide Combination
    A cleaning technique that uses the chemical reaction to create oxide film and remove particles by removing the oxide film.
    Si, SiC Product
    #Chemical #Oxdiation #Particle Removal #Si Product #Strip

  • Cleaning

    PSC™
    Pure Surface Clean
    A cleaning technique using flake size CO2(carbon dioxide) as a projectile to remove particles.
    All Product
    #All Product #Dry Ice #Particle Removal

  • Coating

    PVD
    Physical Vapor Deposition
    #Coating

R

  • CoatingCleaning

    Roughness
    Roughness
    Roughness defines surface metrology calculated using wave-length of Rmax and Rmin. Roughness is express in the average value of collected data and is called Ra.
    All Product
    #Cleaning #Coating

S

  • Cleaning

    S-LPC™
    Static Liquid Particle Counter
    A particle measuring device using ultrasonic wave.
    All Product
    #All Product #Liquid Particle Counter

  • Cleaning

    SBC™
    Super Bubble Clean
    A post-cleaning technique using micro size bubble cleansing.
    All Product
    #All Product #Bubble #Deionized Water #Micro #Particle Removal

  • Coating

    Slurry
    Slurry
    The slurry in SPS coating is a mixture of Yttrium powder and liquid additives.
    #Coating #Suspension Plasma Spray

  • Cleaning

    SSC™
    Super Sonic Clean
    Multi-frequency ultrasonic cleaning technique.
    All Product
    #All Product #Deionized Water #Particle Removal #Ultra Sonic

T

  • Cleaning

    TIC™
    Tornado Ion Clean
    A cleaning technique that removes metal ions in the surface using chelate chemical
    All Product
    #All Product #Chemical #Ion Removal

U

  • Coating

    UHD-1
    UHD(Ultra High Density)-1
    A coating technique to form a high-density coating layer using liquefied Y₂O₃ powder.
    Plasma Etch 3-D type Product
    #3-D Product #Fine Powder #Plasma Etch

  • Coating

    UHD-2
    UHD(Ultra High Density) -2
    A coating technique to form a higher-density coating layer using liquefied smaller size Y₂O₃ powder.
    Plasma Etch 3-D type Product
    #3-D Product #Fine Powder #Plasma Etch

  • Cleaning

    Ultra Pad
    Ultra Pad
    Special made wiper not to cause the particle issue.
    All Product
    #UPW™

  • Cleaning

    UPW™
    Ultra Pad Wiping
    A cleaning technique to remove the surface particles using the ultra pad
    All Product
    #All Product #Particle Removal #Physical

  • Cleaning

    UV
    Ultra Violet
    Lightwave frequency between 10~400nm is used to remove organic substances.
    All Product
    #LWTS™

W

  • Cleaning

    Water Jet
    Water Jet
    Water jet is used at over 1000bar pressure to remove by-products of the semiconductor part.
    All Product
    #No-Dam™

Y

  • Coating

    YAG-2
    YAG-2 Plasma Coating
    A ceramic coating technique that uses atmospheric plasma spray with YAG Powder to create a coating layer.
    Plasma Etch 3-D type Product, high power process
    #3-D Product #APS #Plasma Etch #YAG

  • Coating

    YSO
    YSO Plasma Coating
    A ceramic coating technique that uses atmospheric plasma spray with YSO Powder to create a coating layer.
    Plasma Etch 3-D type Product, high temperature process
    #3-D parts #APS #Plasma Etch #YSO

  • Coating

    YX-1
    YX-1 Plasma Coating
    A ceramic coating technique that uses atmospheric plasma spray with YX-1 Powder to create a coating layer.
    Plasma Etch 3-D type Product
    #3-D Product #APS #Plasma Etch #YF₃

  • Coating

    YX-2
    YX-2 Plasma Coating
    A ceramic coating technique that uses atmospheric plasma spray with YX-2 Powder to create a coating layer.
    Plasma Etch 3-D type Product
    #3-D Product #APS #Plasma Etch #YOF

  • Coating

    Y₂O₃
    Y₂O₃ Plasma Coating
    A ceramic coating technique that uses atmospheric plasma spray with Y₂O₃Powder to create a coating layer.
    Plasma Etch 3-D type Product
    #3-D Product #APS #Plasma Etch #Y₂O₃