Solution
Solution
R&D Center
R&D Center
To achieve innovative technologies on semiconductor parts' cleaning and coating,
CINOS research and development institute conducts countless lab experiments.
Research and development overview
Coating techniques
of APS, SPS, PVD, ALD,
and others development
and performance
improvement studies
Coating materials
studies including Y2O3,
YAG, YOF, SiC, and ETC
Cleaning techniques
and technologies
improvement studies
Research Goals
Research achievements
