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A

  • Coating

    A-ZERON™
    Atomic Layer Deposition-ZERON
    用原子单位叠层，形成涂层的超高密度涂层技术,
    Plasma Etch 3-D type Product
    #3-D Product #Al₂O₃ #APS #Plasma Etch

  • Coating

    AP
    Atmospheric Plasma
    Atmospheric Plasma Spray以在大气中形成Plasma(通过原子, 离子, 电子构成的离子化原子，主要使用Ar)的技术，将APS Coating当作热源使用
    Plasma Etch 3-D type Product
    #APS #Coating #YAG #YF₃ #YOF #Y₂O₃

  • Coating

    APS Al₂O₃
    Atmospheric Plasma Spray Al₂O₃Coating
    通过大气压Plasma的方式(Atmospheric Plasma Spray)将Al2O3 Powder形成涂层Ceramic Coating技术
    Plasma Etch 3-D type Parts
    #3-D Product #Al₂O₃ #APS #Plasma Etch

  • Coating

    Atomic layer
    Atomic Layer
    Atmoic Layer意味着一个原子的Size，ALD意味着将原子一层一层叠起来的Coating
    Plasma Etch 3-D type Product
    #ALD #Al₂O₃

B

  • Cleaning

    By-Product
    By-Product
    清洗的主要目的是去除半导体工程中使用的工程Gas和因等离子反应产生的副产物
    All Product
    #All Process

C

  • Cleaning

    CAUS™
    Chemical Assisted Ultra Sonic
    使用Chemical和 Ultra Sonic的污染膜质和 Particle去除技术
    Shower Head
    #By-Product Removal #Chemical #Hole Product #Ultra Sonic

  • Cleaning

    CDA
    Clean Dry Air
    从油分、水分脱离到干燥，去除0.01μm以上的固体颗粒后得到非常纯净的压缩空气
    All Product
    #All Process

  • Cleaning

    Chelate Chemical
    Chelate Chemical
    Y₂O₃
    All Product
    #TIC™

  • Cleaning

    CIS™
    Chemical Injection System
    使用水泵，Chemical强制注入清洗技术
    Shower Head
    #By-Product Removal #Chemical #Fluid Flow #Hole Product

D

  • Cleaning

    D-LPC™
    Dynamic Liquid Particle Counter
    使用Recycle System的实施检测Particle装备
    All Product
    #All Product #In-line #Liquid Particle Counter

  • Cleaning

    DELTA™
    DELTA Process
    使用Chemical的改善表面光泽技术
    Al Product
    #Al Product #Chemical #Particle Removal #Surface Roughness

  • Cleaning

    DIS™
    Deionized Water Injection System
    使用水泵，Deionized Water强制注入清洗技术
    Shower Head
    #By-Product Removal #Deionized Water #Fluid Flow #Hole Product

  • Cleaning

    DIW
    Deionized Water
    去除矿物质、金属离子等离子们的纯正水
    All Product
    #All Process

E

  • Coating

    E-ARC™
    Enhanced-ARC Spray Coating
    用这种方式，改善ARC Spray Gun的 Nozzle和Cap，改善Roughness特性的ARC Spray Coating技术, 主要应用于PVD工程
    适用于PVD工程产品
    #Al #ARC Spray #Cap #PVD 工程

  • Coating

    E-SAF™
    E-SAC YOF(Enhanced Super Advanced Coating YOF)
    将YOF Fine Powder制造为Slurry，用Suspension Plasma Spray Coating的方式形成高密度Cermaic Coating层的技术
    Plasma Etch 3-D type Product
    #3-D Product #Fine Powder #Plasma Etch #Slurry #SPS #YOF

  • Coating

    E-SAG™
    E-SAC YAG(Enhanced Super Advanced Coating YAG)
    将YAG Fine Powder制造为Slurry，用Suspension Plasma Spray Coating的方式形成高密度Cermaic Coating层的技术
    Plasma Etch 3-D type Product
    #3-D Product #Fine Powder #Plasma Etch #Slurry #SPS #YAG

  • Coating

    E-SAY™
    E-SAC Y₂O₃(Enhanced Super Advanced Coating Y₂O₃)
    将Y₂O₃ Fine Powder制造为Slurry，用Suspension Plasma Spray Coating的方式形成高密度Cermaic Coating层的技术
    Plasma Etch 3-D type Product
    #3-D Product #Fine Powder #Plasma Etch #Slurry #SPS #Y₂O₃

  • Coating

    Embossing
    Embossing
    Embossing是为了将Coating层的表面积最大化，制造Coating前的特殊现象的方法
    Plasma Etch 3-D type Product
    #Aluminium #ARC Spray #PVD 工程

  • Coating

    EP-ZERON™
    Electronic beam Physical Vapor Deposition-ZERON Coating
    根据E-Beam PVD法的超高密度Ceramic Coating技术
    Plasma Etch Plate type Product
    #E-beam evaporation #Plasma Etching #Plate type Product #PVD #YAG #YOF #YSO #Y₂O₃

H

  • Coating

    HEMI-2000T™
    HEMIsphere Enhanced ARC Spray Coating- Ra 2000 μinch
    用ARC Spray Hemi Coating形成Ra 2000 μinch的Embossing技术
    PVD 3-D type Product
    #3-D Product #ARC Spray #Hemisphere #Metal Coating #PVD 工程

  • Coating

    HEMI-4000E™
    HEMIsphere Enhanced ARC Spray Coating-Ra 4000 μinch
    用ARC Spray Hemi Coating形成Ra 4000 μinch的Embossing技术
    PVD 3-D type Product
    #3-D Product #ARC Spray #Hemisphere #Metal Coating #PVD 工程

  • Coating

    HEMI-600E™
    HEMIsphere Enhanced ARC Spray Coating- Ra 600 μinch
    用ARC Spray Hemi Coating形成Ra 600 μinch的Embossing技术
    PVD 3-D type Product
    #3-D Product #ARC Spray #Hemisphere #Metal Coating #PVD 工程

  • Coating

    HEMI™
    HEMI ARC Coating
    将Al wire用ARC Spary的方式形成Roughness 2000μinch以上的Metal Coating技术
    PVD 3-D type Product
    #3-D Product #ARC Spray #Hemisphere #Metal Coating #PVD 工程

  • Cleaning

    HPWS™
    High Pressure Water Spray
    高压 Deionized Water Spray
    All Product
    #All Product #Deionized Water #High Pressure #Particle Removal

  • Cleaning

    HTGS™
    High Temperature Gas Spray
    使用Hot Steam的去除工程附属品的清洗技术
    Shower Head, SUS Product
    #All Product #By-Product Removal #Hot Gas

L

  • Cleaning

    LWTS
    Light Wave Treatment on Surface
    使用Ultra Violet的重整、改善表面的技术
    APS, SAC Coating Product
    #Coating Treatment #Organic #Surface Treatment #Ultra Violet

M

  • Coating

    MAHA™
    MAHA
    以3D Printing的方式，使用Metal Powder的超高密度Metal Coating技术
    PVD Ring type Product
    #3-D Printing #Free Shape #Metal Coating #PVD 工程

  • Cleaning

    MBS™
    Micro Brush System
    ARC Coating表面清洗技术
    ARC Coating Product
    #ARC Coating Product #Particle Removal #Physical

  • Cleaning

    Micro Size bubble
    Micro Size bubble
    对50μm以下大小的泡沫定义
    All Product
    #SBC™

  • Cleaning

    MPS™
    Micro Powder Spray
    Pellet Size CO₂清洗技术
    All Product
    #All Product #Dry Ice #Particle Removal

N

  • Cleaning

    No-Dam™
    No-Damage
    用Water Jet Cleaning将Coating分离、去除污染膜质, 最小化Hole Size变化的技术
    APS, SAC, ARC Coating Product
    #All Product #By-Product #Deionized Water #High Pressure

P

  • Coating

    P-ZERON
    Physical Vapor Deposition- ZERON Coating
    根据Sputtering的超高密度Ceramic Coating技术, 应用于5㎚ 级 Plasma Etching设备中
    Etch Plate type Product
    #Plasma Etch #Plate type Product #PVD #Sputtering

  • Cleaning

    Particle
    Particle
    无机物，有机物，金属等半导体工程中引起缺陷的要素
    All Product
    #All Process

  • Cleaning

    PBC™
    Pulse Beam Clean
    使用Laser去除污染膜质的技术
    APS, SAC Coating Product
    #By-Product Removal #Coating Product #Dry Clean #Laser

  • Cleaning

    PBR-2™
    Power Bubble Rinse-2
    使用High Power Air Bubble，Deionized Water强制注入清洗技术
    Shower Head
    #Bubble #Deionized Water #High Pressure #Hole Product #Particle Removal

  • Cleaning

    PBR™
    Power Bubble Rinse
    使用Air Bubble，Deionized Water强制注入清洗技术
    Shower Head
    #Bubble #Deionized Water #Hole Product #Particle Removal

  • Cleaning

    POC™
    Particle Oxide Combination
    将Particle和氧化膜结合，去除Particle的技术
    Si, SiC Product
    #Chemical #Oxdiation #Particle Removal #Si Product #Strip

  • Cleaning

    PSC™
    Pure Surface Clean
    Snow Size CO₂ 清洗技术
    All Product
    #All Product #Dry Ice #Particle Removal

  • Coating

    PVD
    Physical Vapor Deposition
    #Coating

R

  • CoatingCleaning

    Roughness
    Roughness
    Roughness表示表面粗糙度，通常将Roughness用R来表示，最高高度为Rmax, 用Ra表示中心线的平均粗糙度，主要使用Ra值。
    All Product
    #Cleaning #Coating

S

  • Cleaning

    S-LPC™
    Static Liquid Particle Counter
    使用Ultra Sonic的Particle测定装备
    All Product
    #All Product #Liquid Particle Counter

  • Cleaning

    SBC™
    Super Bubble Clean
    使用Micro Size Bubble的后处理清洗技术
    All Product
    #All Product #Bubble #Deionized Water #Micro #Particle Removal

  • Coating

    Slurry
    Slurry
    固体和液体的混合物，或是微小的固体粒子在水中悬浮成为悬浮液，就SPS Coating而言，混合使用包含Yttrium成分的Ceramic固体、水和添加剂。
    #Coating #Suspension Plasma Spray

  • Cleaning

    SSC™
    Super Sonic Clean
    多频Ultra Sonic清洗技术
    All Product
    #All Product #Deionized Water #Particle Removal #Ultra Sonic

T

  • Cleaning

    TIC™
    Tornado Ion Clean
    使用Chelate Chemical的去除表面Metal离子清洗技术
    All Product
    #All Product #Chemical #Ion Removal

U

  • Coating

    UHD-1
    UHD(Ultra High Density)-1
    使用被流动化处理的Y₂O₃ Powder，形成高密度Coating层的技术
    Plasma Etch 3-D type Product
    #3-D Product #Fine Powder #Plasma Etch

  • Coating

    UHD-2
    UHD(Ultra High Density) -2
    减少流动化处理的Y₂O₃ Powder Size，提高Coating密度的Coating技术
    Plasma Etch 3-D type Product
    #3-D Product #Fine Powder #Plasma Etch

  • Cleaning

    Ultra Pad
    Ultra Pad
    是不引发Particle，特殊制作的Wiper
    All Product
    #UPW™

  • Cleaning

    UPW™
    Ultra Pad Wiping
    使用Ultra Pad，去除表面Particle的技术
    All Product
    #All Product #Particle Removal #Physical

  • Cleaning

    UV
    Ultra Violet
    比可见光波短的波长(10~400㎚),适用于去除有机物等
    All Product
    #LWTS™

W

  • Cleaning

    Water Jet
    Water Jet
    使用1000bar以上的强水压，达到去除Coating, By-Product的目的
    All Product
    #No-Dam™

Y

  • Coating

    YAG-2
    YAG-2 Plasma Coating
    通过大气压Plasma的方式(Atmospheric Plasma Spray)将YAG Powder形成涂层Ceramic Coating技术
    Plasma Etch 3-D type Product, high power 工程
    #3-D Product #APS #Plasma Etch #YAG

  • Coating

    YSO
    YSO Plasma Coating
    通过大气压Plasma的方式(Atmospheric Plasma Spray)将YSO Powder形成涂层Ceramic Coating技术
    Plasma Etch 3-D type Product, 高温工程
    #3-D parts #APS #Plasma Etch #YSO

  • Coating

    YX-1
    YX-1 Plasma Coating
    通过大气压Plasma的方式(Atmospheric Plasma Spray)将YF3 Powder形成涂层Ceramic Coating技术
    Plasma Etch 3-D type Product
    #3-D Product #APS #Plasma Etch #YF₃

  • Coating

    YX-2
    YX-2 Plasma Coating
    通过大气压Plasma的方式(Atmospheric Plasma Spray)将YOF Powder形成涂层Ceramic Coating技术
    Plasma Etch 3-D type Product
    #3-D Product #APS #Plasma Etch #YOF

  • Coating

    Y₂O₃
    Y₂O₃ Plasma Coating
    通过大气压Plasma的方式(Atmospheric Plasma Spray)将Y₂O₃ Powderr形成涂层Ceramic Coating技术
    Plasma Etch 3-D type Product
    #3-D Product #APS #Plasma Etch #Y₂O₃